Magnifications 10× - 100,000× (Photographic magnification)
25× - 250,000× (monitor display magnification)
Accelerating voltage 5 kV, 10 kV, 15 kV, 20 kV
Image signal Backscattered electron
Secondary electron
Mix (Backscattered electron + Secondary electron) Backscattered electron
Vacuum mode BSE: Conductor/Standard/Charge-up reduction
SE: Standard/Charge-up reduction
Mix: Standard/Charge-up reduction BSE: Standard/Charge-up reduction
Sample stage traverse X: 40 mm, Y: 35 mm
Maximum sample size 80 mm (diameter), 50 mm (thickness)
Electron gun Pre-centered cartridge tungsten filament
Signal detection system High-Sensitivity 4-segment BSE detector
High-Sensitivity Low-Vacuum SE detector (UVD)
Evacuation system
(vacuum pump) Turbo molecular pump : 67 L/s×1 unit
Diaphragm pump : 20 L/min×1 unit
Size / weight Main unit (motorized stage): 330 (width)×614 (depth)×547 (height) mm, 54 kg
Main unit (manual stage): 330(width)×617(depth)×547(height) mm, 54 kg
Diaphragm pump: 144 (width)×270 (depth)×216 (height) mm, 5.5kg
